E. Cekan

Ion-beam direct-structuring of high-temperature superconductors

W. Lang, M. Dineva, Markus Marksteiner et al. · Microelectronic Engineering · 2006 · 25 citations

Natural Sciences, Materials Science, Physics +11

Experimental investigation of stochastic space charge effects on pattern resolution in ion projection lithography systems

E. Hammel, A. Chalupka, J. Fegerl et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 16 citations

Engineering, Physics, Microelectromechanical Systems +10

Ion projection lithography below 70 nm: tool performance and resist process

Stefan Hirscher, M. Kümmel, Oliver Kirch et al. · Microelectronic Engineering · 2002 · 15 citations

Engineering, Electrical Engineering, Materials Science +11

Experimental results of the stochastic Coulomb interaction in ion projection lithography

P.W.H. de Jager, G. Derksen, B. Mertens et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 12 citations

Natural Sciences, Physics, Optics +9

Resist process development for sub-100-nm ion projection lithography

Stefan Hirscher, Rainer Kaesmaier, Wolf‐Dieter Domke et al. · Microelectronic Engineering · 2001 · 10 citations

Engineering, Electrical Engineering, Materials Science +13