Masataka Hourai

Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon

Shinsuke Sadamitsu, Shigeru Umeno, Yasuo Koike et al. · Japanese Journal of Applied Physics · 1993 · 135 citations

Natural Sciences, Materials Engineering, Materials Science +17

A Method of Quantitative Contamination with Metallic Impurities of the Surface of a Silicon Wafer

Masataka Hourai, Toshio Naridomi, Yasunori Oka et al. · Japanese Journal of Applied Physics · 1988 · 113 citations

Natural Sciences, Materials Engineering, Materials Science +17

Behavior of Defects Induced by Metallic Impurities on Si(100) Surfaces

Masataka Hourai, Katsumi Murakami, Tatsuhiko Shigematsu et al. · Japanese Journal of Applied Physics · 1989 · 57 citations

Natural Sciences, Materials Engineering, Materials Science +15

Axial Microscopic Distribution of Grown-in Defects in Czochralski-Grown Silicon Crystals

Shigeru Umeno, Shinsuke Sadamitsu, Hiroki Murakami et al. · Japanese Journal of Applied Physics · 1993 · 38 citations

Natural Sciences, Electrical Engineering, Materials Science +17

Growth Parameters Determining the Type of Grown-In Defects in Czockralski Silicon Crystals

Masataka Hourai, Eiji Kajita, Takuji Nagashima et al. · Materials science forum · 1995 · 32 citations · Full text

Engineering, Materials Engineering, Materials Science +16