Concepedia

Yasunori Oka

YO

1

Publications

113

Citations

1

H-Index

1988

Active since

Yasunori Oka is an author specializing in microfabrication, electrical engineering, and applied physics.

Top concepts

CorrosionEngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationElectronic PackagingElectrical Engineering

Publications per year

1988–1988

1

Publications

1

A Method of Quantitative Contamination with Metallic Impurities of the Surface of a Silicon Wafer

Masataka Hourai, Toshio Naridomi, Yasunori Oka et al. · Japanese Journal of Applied Physics · 1988 · 113 citations

Engineering, Metallic Impurity, Silicon On Insulator +17

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