Concepedia

Katsumi Murakami

KM

2

Publications

170

Citations

2

H-Index

1988

Active since

Katsumi Murakami is an author specializing in applied physics, surface science, and corrosion.

Top concepts

CorrosionEngineeringApplied PhysicsSurface ScienceMaterial SciencePhysicsMicrostructureDefect ToleranceMicroelectronicsMicrofabrication

Publications per year

1988–1989

2

Publications

2

A Method of Quantitative Contamination with Metallic Impurities of the Surface of a Silicon Wafer

Masataka Hourai, Toshio Naridomi, Yasunori Oka et al. · Japanese Journal of Applied Physics · 1988 · 113 citations

Engineering, Metallic Impurity, Silicon On Insulator +17

Behavior of Defects Induced by Metallic Impurities on Si(100) Surfaces

Masataka Hourai, Katsumi Murakami, Tatsuhiko Shigematsu et al. · Japanese Journal of Applied Physics · 1989 · 57 citations

Magnetic Properties, Engineering, Silicon On Insulator +18

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