Shigeru Umeno

Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon

Shinsuke Sadamitsu, Shigeru Umeno, Yasuo Koike et al. · Japanese Journal of Applied Physics · 1993 · 135 citations

Growth Rates, Engineering, Crystal Growth Technology +17

Axial Microscopic Distribution of Grown-in Defects in Czochralski-Grown Silicon Crystals

Shigeru Umeno, Shinsuke Sadamitsu, Hiroki Murakami et al. · Japanese Journal of Applied Physics · 1993 · 38 citations

Materials Science, Axial Microscopic Distribution, Oxygen Concentration +15

Growth Parameters Determining the Type of Grown-In Defects in Czockralski Silicon Crystals

Masataka Hourai, Eiji Kajita, Takuji Nagashima et al. · Materials science forum · 1995 · 32 citations

Materials Science, Engineering, Physics +10

Defect Formation Behaviors in Heavily Doped Czochralski Silicon

Wataru Sugimura, Toshiaki Ono, Shigeru Umeno et al. · ECS Transactions · 2006 · 28 citations

Materials Science, Nucleation Rate, Point Defects +10

Relationship between Grown-in Defects in Czochralski Silicon Crystals

Shigeru Umeno, Masahiko Okui, Masataka Hourai et al. · Japanese Journal of Applied Physics · 1997 · 22 citations

Materials Science, Engineering, Physics +14