Statistics
Publications
4
Citations
81
H-Index
4
Active since
2006
Affiliations
Sumco Corporation (Japan)(Current)
Wataru Sugimura is an author at Sumco Corporation (Japan) specializing in engineering, applied physics, and defect tolerance.
Publications per year
2006–2019
4
4
Defect Formation Behaviors in Heavily Doped Czochralski Silicon
Wataru Sugimura, Toshiaki Ono, Shigeru Umeno et al. · ECS Transactions · 2006 · 28 citations
Manabu Nishimoto, Kozo Nakamura, Masataka Hourai et al. · Journal of the Japan Institute of Metals and Materials · 2011 · 11 citations
1–4 of 4