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Growth Parameters Determining the Type of Grown-In Defects in Czockralski Silicon Crystals
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1995
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Materials ScienceEngineeringPhysicsCrystal MaterialCrystal Growth TechnologyApplied PhysicsCzockralski Silicon CrystalsGrown-in DefectsDefect FormationSilicon On InsulatorDefect ToleranceCrystallographyGrowth Parameters
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