P. Benkart

Piezoelectric GaN sensor structures

Tom Zimmermann, Martin Neuburger, P. Benkart et al. · IEEE Electron Device Letters · 2006 · 126 citations

Engineering, Materials Engineering, Materials Science +17

3D Chip Stack Technology Using Through-Chip Interconnects

P. Benkart, A. Kaiser, A. Munding et al. · IEEE Design & Test of Computers · 2005 · 92 citations

Engineering, Computer Engineering, Electrical Engineering +17

Three-dimensional integration scheme with a thermal budget below 300 °C

P. Benkart, A. Munding, A. Kaiser et al. · Sensors and Actuators A Physical · 2007 · 22 citations

Engineering, Computational Engineering, Mechanical Engineering +13

Concept for diamond 3-D integrated UV sensor

A. Kaiser, Daniel Kueck, P. Benkart et al. · Diamond and Related Materials · 2006 · 17 citations

Engineering, Materials Engineering, Optical Materials +11