Nadia Vandenbroeck

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +17

28nm pitch single exposure patterning readiness by metal oxide resist on 0.33NA EUV lithography

Danilo De Simone, Luka Ključar, Poulomi Das et al. · 2021 · 25 citations

Engineering, Electrical Engineering, Manufacturing Engineering +9

Progress in directed self-assembly hole shrink applications

Todd R. Younkin, Roel Gronheid, Paulina Rincon Delgadillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +16

Process optimization of templated DSA flows

Roel Gronheid, Joost Bekaert, Vijaya-Kumar Murugesan Kuppuswamy et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations

Engineering, Materials Engineering, Materials Science +16

Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 13 citations

Engineering, Manufacturing Engineering, Digital Fabrication +16