S. Dakshina-Murthy

Physical and electrical properties of metal gate electrodes on HfO2 gate dielectrics

J. Schaeffer, S. Samavedam, D. C. Gilmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 100 citations

Engineering, Electrical Properties, Gate Dielectric +18

Dual-metal gate CMOS with HfO/sub 2/ gate dielectric

S. Samavedam, L.B. La, James A. Smith et al. · 2003 · 37 citations

Dual-metal Integration, Electrical Engineering, Engineering +9

CMOS-compatible planar silicon waveguide-grating-coupler photodetectors fabricated on silicon-on-insulator (SOI) substrates

S.M. Csutak, S. Dakshina-Murthy, Joe C. Campbell · IEEE Journal of Quantum Electronics · 2002 · 23 citations

Photonics, Engineering, Waveguide-grating Couplers +12

A Novel Approach for the Patterning and High-Volume Production of Sub-40-nm Gates

Karen Romero, Ralf Stephan, M. Mazur et al. · IEEE Transactions on Semiconductor Manufacturing · 2005 · 20 citations

Engineering, Patterning Layer, Novel Approach +18