Concepedia

Robert Havemann

RH

28

Publications

960

Citations

16

H-Index

1978

Active since

Affiliations

Texas Instruments (United States)(Current)

Micro Focus (United States)

The University of Texas at Austin

Philips (Netherlands)

National Institute of Standards and Technology

Robert Havemann is an author at Texas Instruments (United States) specializing in engineering, electrical engineering, and microelectronics.

Top concepts

EngineeringMicroelectronicsElectrical EngineeringApplied PhysicsMaterial ScienceElectronic PackagingElectrical InsulationMaterials EngineeringNanoelectronicsSurface Science

Publications per year

1978–2008

28

Publications

28

High-performance interconnects: an integration overview

Robert Havemann, J.A. Hutchby · Proceedings of the IEEE · 2001 · 326 citations

Engineering, Device Integration, Computer Architecture +18

Direct observation of a critical length effect in dual-damascene Cu/oxide interconnects

Ennis T. Ogawa, Alexander J. Bierwag, Ki-Don Lee et al. · Applied Physics Letters · 2001 · 68 citations

Engineering, Integrated Circuits, Dual-damascene Cu/oxide Interconnects +17

Air-gap formation during IMD deposition to lower interconnect capacitance

B.P. Shieh, Krishna C. Saraswat, J.P. McVittie et al. · IEEE Electron Device Letters · 1998 · 64 citations

Engineering, Metal Lines, Chemical Deposition +16

Statistics of electromigration early failures in Cu/oxide dual-damascene interconnects

E.T. Ogawa, K.-D. Lee, Hideki Matsuhashi et al. · 2002 · 51 citations

Engineering, Interconnect (Integrated Circuits), Failure Behavior +17

Process Integration and Manufacturasility Issues for High Performance Multilevel Interconnect

Shin-Puu Jeng, Robert Havemann, Mi-Chang Chang · MRS Proceedings · 1994 · 47 citations

Process Integration, Electrical Engineering, Physical Design (Electronics) +9

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