Statistics
Publications
6
Citations
180
H-Index
6
Active since
1999
Affiliations
Chris Van Peski is an author at Massachusetts Institute of Technology specializing in materials science, optical materials, and natural sciences.
Publications per year
1999–2007
6
6
Materials issues for optical components and photomasks in 157 nm lithography
Vladimir Liberman, T. M. Bloomstein, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 54 citations
Natural Sciences, Materials Engineering, Materials Science +16
157 nm: Deepest deep-ultraviolet yet
M. Rothschild, T. M. Bloomstein, Jane E. Curtin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 48 citations
Natural Sciences, Manufacturing Engineering, Materials Science +11
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