Concepedia

Zhen‐Hong Zhou

ZZ

Statistics

Publications

6

Citations

113

H-Index

6

Active since

1990

Affiliations

Massachusetts Institute of Technology(Current)

Zhen‐Hong Zhou is an author at Massachusetts Institute of Technology specializing in materials science, natural sciences, and plasma cleaning.

Publications per year

1990–1997

6

Publications

6

Real‐Time, In Situ Monitoring of Room‐Temperature Silicon Surface Cleaning Using Hydrogen and Ammonia Plasmas

Zhen‐Hong Zhou, Eray S. Aydil, Richard A. Gottscho et al. · Journal of The Electrochemical Society · 1993 · 43 citations

Natural Sciences, Electrical Engineering, Materials Science +17

Chemical sputtering of Al2O3 by fluorine-containing plasmas excited by electron cyclotron resonance

Y. H. Lee, Zhen‐Hong Zhou, D. A. Danner et al. · Journal of Applied Physics · 1990 · 18 citations

Natural Sciences, Materials Science, Physics +9

A multichamber single-wafer chemical vapor deposition reactor and electron cyclotron resonance plasma for flexible integrated circuit manufacturing

Zhen‐Hong Zhou, Fuzhong Yu, R. Reif · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 15 citations

Engineering, Materials Science, Physics +17

In-situ monitoring of epitaxial film thickness by IEMI

Fuzhong Yu, Zhen‐Hong Zhou, P. Stout et al. · IEEE Transactions on Semiconductor Manufacturing · 1992 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +17

Room temperature wafer surface cleaning by in-situ ECR (electron cyclotron resonance) hydrogen plasma for silicon homoepitaxial growth

Hyoun-Woo Kim, Zhen‐Hong Zhou, R. Reif · Thin Solid Films · 1997 · 12 citations

Engineering, Materials Engineering, Materials Science +17

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