P. Varekamp - Concepedia

Author

P. Varekamp

Also Known As

P. Varekamp, P.R. Varekamp, Patrick Varekamp

Publications

154

Citations

H-Index

Concepts

All Affiliations

P. Varekamp is an author at IBM (United States) specializing in microelectronics, electrical engineering, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	146
2	Electrical Engineering	5	5	146
3	Applied Physics	4	4	136
4	Computer Engineering	2	2	34
5	Physics	1	1	82

P. Varekamp

Publications

146

Citations

H-Index

Page 1

	Year	Citations
Voltage-dependent voltage-acceleration of oxide breakdown for ultra-thin oxides Ernest Y. Wu, J. Aitken, E. Nowak, Electrical EngineeringEngineeringDefect Generation ProbabilityPhysicsFractional Energy	2002	82
A high performance 0.13 μm SOI CMOS technology with Cu interconnects and low-k BEOL dielectric P. Smeys, V. McGahay, Insoon Yang, Low-k Beol DielectricElectrical EngineeringCu WiringEngineeringVlsi Design	2002	24
Breakdown measurements of ultra-thin SiO/sub 2/ at low voltage J. H. Stathis, A. Vayshenker, P. Varekamp, Electrical EngineeringEngineeringDefect Generation ProbabilityNanoelectronicsLow Voltage	2002	20
Subresolution assist feature implementation for high-performance logic gate-level lithography Allen H. Gabor, James A. Bruce, W. H. Chu, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Electrical EngineeringPhysical Design (Electronics)EngineeringVlsi DesignCircuit Design	2002	10
A high performance 0.13 μm SOI CMOS technology with a 70 nm silicon film and with a second generation low-k Cu BEOL J.W. Sleight, P. Varekamp, N. Lustig, Electrical EngineeringSecond Generation 1.2EngineeringVlsi DesignAdvanced Packaging (Semiconductors)	2002	10

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