Taesoon Kwon

Plasma-surface interactions of model polymers for advanced photoresists using C4F8∕Ar discharges and energetic ion beams

Sebastian Engelmann, Robert L. Bruce, Taesoon Kwon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 68 citations

Engineering, Electron-beam Lithography, Model Polymers +24

Study of ion and vacuum ultraviolet-induced effects on styrene- and ester-based polymers exposed to argon plasma

Robert L. Bruce, Sebastian Engelmann, T. Lin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 67 citations

Materials Science, Ester-based Polymers, Chemical Engineering +15

Near-surface modification of polystyrene by Ar+: Molecular dynamics simulations and experimental validation

Joseph J. Végh, D. Nest, David B. Graves et al. · Applied Physics Letters · 2007 · 56 citations

Engineering, Experimental Validation, Chemistry +19

Molecular dynamics simulations of near-surface modification of polystyrene: Bombardment with Ar+ and Ar+/radical chemistries

Joseph J. Végh, D. Nest, David B. Graves et al. · Journal of Applied Physics · 2008 · 38 citations

Ar+/radical Chemistries, Engineering, Chemistry +21

Plasma-surface interactions of advanced photoresists with C4F8∕Ar discharges: Plasma parameter dependencies

Sebastian Engelmann, Robert L. Bruce, Masahiro Sumiya et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 23 citations

Engineering, Glow Discharge, Plasma-surface Interactions +20