Concepedia
Statistics
Publications
9
Citations
353
H-Index
Active since
2005
Affiliations
University of California, Berkeley(Current)
The University of Texas at Austin
University of Maryland, College Park
Joseph J. Végh is an author at University of California, Berkeley specializing in materials science, engineering, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsPolymer ScienceSurface SciencePolymer ChemistryChemistryMolecular DynamicsPolymer ProcessingPhysics
Publications per year
2005–2010
Relationship between nanoscale roughness and ion-damaged layer in argon plasma exposed polystyrene films
Robert L. Bruce, F. Weilnboeck, T. Lin et al. · Journal of Applied Physics · 2010 · 101 citations
Engineering, Mechanical Engineering, Nanoscale Roughness +20
Study of ion and vacuum ultraviolet-induced effects on styrene- and ester-based polymers exposed to argon plasma
Robert L. Bruce, Sebastian Engelmann, T. Lin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 67 citations
Materials Science, Ester-based Polymers, Chemical Engineering +15
Near-surface modification of polystyrene by Ar+: Molecular dynamics simulations and experimental validation
Joseph J. Végh, D. Nest, David B. Graves et al. · Applied Physics Letters · 2007 · 56 citations
Engineering, Experimental Validation, Chemistry +19
Molecular dynamics simulations of near-surface modification of polystyrene: Bombardment with Ar+ and Ar+/radical chemistries
Joseph J. Végh, D. Nest, David B. Graves et al. · Journal of Applied Physics · 2008 · 38 citations
Ar+/radical Chemistries, Engineering, Chemistry +21
Silicon etch by fluorocarbon and argon plasmas in the presence of fluorocarbon films
Joseph J. Végh, David Humbird, David B. Graves · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 26 citations
Engineering, Silicon On Insulator, Plasma Processing +18
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