Concepedia

T. Lin

TL

10

Publications

401

Citations

10

H-Index

2009

Active since

Affiliations

University of Maryland, College Park(Current)

The University of Texas at Austin

University of California, Berkeley

Dayeh University

National Chung Hsing University

T. Lin is an author at University of Maryland, College Park specializing in materials science, engineering, and applied physics.

Top concepts

Publications per year

2009–2018

10

Publications

10

Relationship between nanoscale roughness and ion-damaged layer in argon plasma exposed polystyrene films

Robert L. Bruce, F. Weilnboeck, T. Lin et al. · Journal of Applied Physics · 2010 · 101 citations

, , +20

Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF4/O2 Plasma Chambers Using Y2O3 and YF3 Protective Coatings

T. Lin, Wei‐Kai Wang, Shih-Yung Huang et al. · Nanomaterials · 2017 · 72 citations · Full text

Study of ion and vacuum ultraviolet-induced effects on styrene- and ester-based polymers exposed to argon plasma

Robert L. Bruce, Sebastian Engelmann, T. Lin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 67 citations

, , +15

Preparation and Characterization of Sprayed-Yttrium Oxyfluoride Corrosion Protective Coating for Plasma Process Chambers

T. Lin, Dong‐Sing Wuu, Shih-Yung Huang et al. · Coatings · 2018 · 38 citations · Full text

, , +11

Characteristics of yttrium fluoride and yttrium oxide coatings for plasma process equipment prepared by atmospheric plasma spraying

T. Lin, Dong‐Sing Wuu, Shih-Yung Huang et al. · Japanese Journal of Applied Physics · 2016 · 33 citations

, , +11

Rows per page

1–5 of 10