Concepedia
Statistics
Publications
18
Citations
452
H-Index
15
Active since
2006
Affiliations
Dayeh University(Current)
National Chung Hsing University
National Formosa University
National Yang Ming Chiao Tung University
National Taipei University
Shih-Yung Huang is an author at Dayeh University specializing in materials science, materials engineering, and natural sciences.
Publications per year
2006–2023
Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF4/O2 Plasma Chambers Using Y2O3 and YF3 Protective Coatings
T. Lin, Wei‐Kai Wang, Shih-Yung Huang et al. · Nanomaterials · 2017 · 80 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
Influence of Annealing Temperature on the Properties of ZnGa2O4 Thin Films by Magnetron Sputtering
Wei‐Kai Wang, Kuo-Feng Liu, Pi‐Chuen Tsai et al. · Coatings · 2019 · 43 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +15
Preparation and Characterization of Sprayed-Yttrium Oxyfluoride Corrosion Protective Coating for Plasma Process Chambers
T. Lin, Dong‐Sing Wuu, Shih-Yung Huang et al. · Coatings · 2018 · 39 citations · Full text
Characteristics of yttrium fluoride and yttrium oxide coatings for plasma process equipment prepared by atmospheric plasma spraying
T. Lin, Dong‐Sing Wuu, Shih-Yung Huang et al. · Japanese Journal of Applied Physics · 2016 · 34 citations
Natural Sciences, Materials Engineering, Materials Science +16
Plasma Etching Behavior of SF6 Plasma Pre-Treatment Sputter-Deposited Yttrium Oxide Films
Wei‐Kai Wang, Sung‐Yu Wang, Kuo-Feng Liu et al. · Coatings · 2020 · 27 citations · Full text
1–5 of 18