Delphine Le Cunff

Photoluminescence Imaging for Buried Defects Detection in Silicon: Assessment and Use-Cases

Romain Duru, Delphine Le Cunff, Maxime Cannac et al. · IEEE Transactions on Semiconductor Manufacturing · 2018 · 19 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

João Resende, D. Fuard, Delphine Le Cunff et al. · Materials Chemistry and Physics · 2020 · 15 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Photoluminescence for in-line buried defects detection in silicon devices

Romain Duru, Delphine Le Cunff, Maxime Cannac et al. · 2017 · 14 citations

Engineering, Electrical Engineering, Materials Science +17

Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures

Hoang-Lam Pham, Thomas Alcaire, S. Soulan et al. · Nanomaterials · 2022 · 11 citations · Full text

Engineering, Materials Science, Nanomaterials +16

Benefits of XPS nanocharacterization for process development and industrial control of thin SiGe channel layers in advanced CMOS technologies

Laurent Fauquier, B. Pelissier, D. Jalabert et al. · Materials Science in Semiconductor Processing · 2016 · 10 citations

Engineering, Electrical Engineering, Materials Science +17