Publication | Open Access

Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

Ii-vi SemiconductorOptical Constants DeterminationOptical MaterialsEngineeringPhysicsSion Thin FilmsOptical PropertiesApplied PhysicsEnergy Loss SpectraSemiconductor MaterialThin FilmsSilicon On InsulatorOptoelectronicsSpectroscopic PropertyThin Film Processing