Statistics
Publications
5
Citations
482
H-Index
5
Active since
1990
Tetsu Akiyama is an author at The University of Osaka specializing in life sciences, molecular biology, and genetics.
Publications per year
1990–2003
5
5
Shigeyuki Takagi, Seiji Onoue, Katsumi Iyanagi et al. · Plasma Sources Science and Technology · 2003 · 16 citations
Natural Sciences, Materials Engineering, Materials Science +17
Advanced electron-beam writing system EX-11 for next-generation mask fabrication
Toru Tojo, Ryoji Yoshikawa, Yoji Ogawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations
Engineering, Manufacturing Engineering, Electronic Materials +9
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