Shigeyuki Takagi

Development of key components and technologies for a high repetition rate and high-power excimer laser

Tatsumi Goto, Shigeyuki Takagi, Kouji Kakizaki et al. · Review of Scientific Instruments · 1998 · 28 citations

Natural Sciences, Physics, Optoelectronics +14

Modeling of Cu Transport in Sputtering Using a Monte Carlo Simulation

Osamu Yamazaki, Katsumi Iyanagi, Shigeyuki Takagi et al. · Japanese Journal of Applied Physics · 2002 · 21 citations

Natural Sciences, Materials Science, Physics +17

Statistical study of subthreshold characteristics in polycrystalline silicon thin-film transistors

Yoshiyuki Kitahara, Shigeyuki Takagi, Nobuyuki Sano · Journal of Applied Physics · 2003 · 20 citations

Engineering, Electrical Engineering, Materials Science +17

Contralateral Development of Acute Subdural Hematoma Following Surgery for Chronic Subdural Hematoma —Case Report—

Katsuhiko Harada, Katsuyasu Ohtsuru, Kenji Nakayama et al. · Neurologia medico-chirurgica · 1992 · 20 citations · Full text

Medicine, Neurological Surgery, Neurosurgery +14

Predictable topography simulation of SiO₂etching by C₅F₈gas combined with a plasma simulation, sheath model and chemical reaction model

Shigeyuki Takagi, Seiji Onoue, Katsumi Iyanagi et al. · Plasma Sources Science and Technology · 2003 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17