Kouji Kakizaki

First generation laser-produced plasma source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 47 citations

Electrical Engineering, Engineering, High Speed +14

100W 1st generation laser-produced plasma light source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 37 citations

Photonics, Electrical Engineering, Engineering +15

300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers

Hongwen Xuan, Zhigang Zhao, Hironori Igarashi et al. · Optics Express · 2015 · 29 citations · Full text

Optical Materials, Engineering, Laser Science +20

Development of key components and technologies for a high repetition rate and high-power excimer laser

Tatsumi Goto, Shigeyuki Takagi, Kouji Kakizaki et al. · Review of Scientific Instruments · 1998 · 28 citations

Engineering, Laser Science, High Repetition Rate +25

Characterization and optimization of tin particle mitigation and EUV conversion efficiency in a laser produced plasma EUV light source

Tatsuya Yanagida, Hitoshi Nagano, Y. Wada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 25 citations

Short Wavelength Optic, Engineering, Sn Particles +15