Concepedia

Tamotsu Abe

TA

24

Publications

538

Citations

15

H-Index

1997

Active since

Affiliations

Komatsu (Japan)(Current)

Tamotsu Abe is an author at Komatsu (Japan) specializing in engineering, high-power lasers, and laser plasma physics.

Top concepts

EngineeringHigh-power LasersLaser Plasma PhysicsPhotonicsApplied PhysicsOptoelectronicsLaser ApplicationsElectrical EngineeringHigh-energy LasersPulse Power

Publications per year

1997–2020

24

Publications

24

First generation laser-produced plasma source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 47 citations

Electrical Engineering, Engineering, High Speed +14

Performance of one hundred watt HVM LPP-EUV source

Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 45 citations

Laser produced EUV light source development for HVM

Akira Endo, Hideo Hoshino, Takashi Suganuma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 41 citations

Engineering, Laser Science, Laser-plasma Interaction +18

100W 1st generation laser-produced plasma light source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 37 citations

Photonics, Electrical Engineering, Engineering +15

Laser-produced plasma-based extreme-ultraviolet light source technology for high-volume manufacturing extreme-ultraviolet lithography

Junichi Fujimoto, Tamotsu Abe, Satoshi Tanaka et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 33 citations

Ultraviolet Light, Engineering, Laser-plasma Interaction +17

Rows per page

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