Tamotsu Abe - Concepedia

Author

Tamotsu Abe

Komatsu (Japan)

Also Known As

Tamotsu ABE, Tamotsu Abe

Publications

703

Citations

H-Index

Concepts

All Affiliations

Komatsu (Japan)

About

Tamotsu Abe is an author at Komatsu (Japan) specializing in engineering, high-power lasers, and laser plasma physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	15	20	446
2	Applied Physics	11	12	232
3	Electrical Engineering	11	12	265
4	Natural Sciences	2	2	64
5	Health Sciences	1	1	21

Tamotsu Abe

Publications

538

Citations

H-Index

Page 1

	Year	Citations
First generation laser-produced plasma source system for HVM EUV lithography Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Electrical EngineeringEngineeringHigh SpeedLaser Plasma PhysicsHvm Euv Lithography	2010	47
Performance of one hundred watt HVM LPP-EUV source Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2015	45
Laser produced EUV light source development for HVM Akira Endo, Hideo Hoshino, Takashi Suganuma, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringLaser ScienceLaser-plasma InteractionLaser PhysicsLaser Applications	2007	41
100W 1st generation laser-produced plasma light source system for HVM EUV lithography Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE PhotonicsElectrical EngineeringEngineeringLaser Plasma PhysicsHvm Euv Lithography	2011	37
Laser-produced plasma-based extreme-ultraviolet light source technology for high-volume manufacturing extreme-ultraviolet lithography Junichi Fujimoto, Tamotsu Abe, Satoshi Tanaka, Journal of Micro/Nanolithography MEMS and MOEMS Ultraviolet LightEngineeringLaser-plasma InteractionLaser Plasma PhysicHigh-power Lasers	2012	33
LPP-EUV light source development for high volume manufacturing lithography Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringElectron-beam LithographyLaser-plasma InteractionLaser Physics	2013	31
Performance of new high-power HVM LPP-EUV source Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2016	25
Laser-produced-plasma light source development for extreme ultraviolet lithography Hiroshi Komori, Tamotsu Abe, Takashi Suganuma, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Extreme Ultraviolet LithographyEngineeringLaser Plasma PhysicsLaser-induced BreakdownConversion Efficiency	2003	24
LPP EUV light source employing high power C0 2 laser Hideo Hoshino, Takashi Suganuma, Takeshi Asayama, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringLaser ScienceLaser-plasma InteractionLaser ApplicationsLaser Physics	2008	24
Sub-hundred Watt operation demonstration of HVM LPP-EUV source Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringEnergy EfficiencyEnergy ConversionLaser-plasma Interaction	2014	23

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