Hiroaki Nakarai - Concepedia

Author

Hiroaki Nakarai

Komatsu (Japan)

Also Known As

H Nakarai, H. Nakarai, Hiroaki Nakarai

Publications

520

Citations

H-Index

Concepts

All Affiliations

Komatsu (Japan)

About

Hiroaki Nakarai is an author at Komatsu (Japan) specializing in engineering, high-power lasers, and photonics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	11	11	261
2	Applied Physics	8	8	162
3	Electrical Engineering	8	8	177
4	Physics	4	4	92
5	Natural Sciences	2	2	64

Hiroaki Nakarai

Publications

341

Citations

H-Index

Page 1

	Year	Citations
First generation laser-produced plasma source system for HVM EUV lithography Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Electrical EngineeringEngineeringHigh SpeedLaser Plasma PhysicsHvm Euv Lithography	2010	47
Performance of one hundred watt HVM LPP-EUV source Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2015	45
100W 1st generation laser-produced plasma light source system for HVM EUV lithography Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE PhotonicsElectrical EngineeringEngineeringLaser Plasma PhysicsHvm Euv Lithography	2011	37
Laser-produced plasma-based extreme-ultraviolet light source technology for high-volume manufacturing extreme-ultraviolet lithography Junichi Fujimoto, Tamotsu Abe, Satoshi Tanaka, Journal of Micro/Nanolithography MEMS and MOEMS Ultraviolet LightEngineeringLaser-plasma InteractionLaser Plasma PhysicHigh-power Lasers	2012	33
LPP-EUV light source development for high volume manufacturing lithography Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringElectron-beam LithographyLaser-plasma InteractionLaser Physics	2013	31
Performance of new high-power HVM LPP-EUV source Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2016	25
Sub-hundred Watt operation demonstration of HVM LPP-EUV source Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringEnergy EfficiencyEnergy ConversionLaser-plasma Interaction	2014	23
Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography Junichi Fujimoto, Tsukasa Hori, Tatsuya Yanagida, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE PhotonicsEngineeringPlasma ProcessingLaser Plasma PhysicsHvm Euv Lithography	2012	20
<title>High-power KrF excimer laser with a solid state switch for microlithography</title> Hakaru Mizoguchi, Noritoshi Ito, Hiroaki Nakarai, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringNew KrfHigh-power Laser TechnologyPower CircuitLaser Science	1996	16
Key components technology update of the 250W high-power LPP-EUV light source Yasufumi Kawasuji, Krzysztof M. Nowak, Tsukasa Hori, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringLaser ScienceLaser ApplicationsPower Electronics	2017	16

Page 1