Concepedia

Hakaru Mizoguchi

HM

33

Publications

729

Citations

17

H-Index

1996

Active since

Affiliations

Komatsu (Japan)(Current)

Kyushu University

The University of Osaka

Ushio (Japan)

Hakaru Mizoguchi is an author at Komatsu (Japan) specializing in engineering, high-power lasers, and applied physics.

Top concepts

Publications per year

1996–2023

33

Publications

33

Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources

Kentaro Tomita, Yuta Sato, Syouichi Tsukiyama et al. · Scientific Reports · 2017 · 50 citations · Full text

First generation laser-produced plasma source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 47 citations

, , +14

Performance of one hundred watt HVM LPP-EUV source

Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 45 citations

Laser produced EUV light source development for HVM

Akira Endo, Hideo Hoshino, Takashi Suganuma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 41 citations

, , +18

100W 1st generation laser-produced plasma light source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 37 citations

, , +15

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