Hakaru Mizoguchi - Concepedia

Author

Hakaru Mizoguchi

Komatsu (Japan)

Also Known As

Hakaru MIZOGUCHI, Hakaru Mizoguchi

197

Publications

1.2K

Citations

H-Index

Concepts

All Affiliations

Komatsu (Japan)Kyushu University The University of Osaka Ushio (Japan)

About

Hakaru Mizoguchi is an author at Komatsu (Japan) specializing in engineering, high-power lasers, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	16	27	573
2	Applied Physics	16	19	372
3	Electrical Engineering	11	12	269
4	Natural Sciences	3	3	86
5	Materials Engineering	1	1	12

Hakaru Mizoguchi

Publications

729

Citations

H-Index

Page 1

	Year	Citations
Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources Kentaro Tomita, Yuta Sato, Syouichi Tsukiyama, Scientific Reports	2017	50
First generation laser-produced plasma source system for HVM EUV lithography Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Electrical EngineeringEngineeringHigh SpeedLaser Plasma PhysicsHvm Euv Lithography	2010	47
Performance of one hundred watt HVM LPP-EUV source Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2015	45
Laser produced EUV light source development for HVM Akira Endo, Hideo Hoshino, Takashi Suganuma, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringLaser ScienceLaser-plasma InteractionLaser PhysicsLaser Applications	2007	41
100W 1st generation laser-produced plasma light source system for HVM EUV lithography Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE PhotonicsElectrical EngineeringEngineeringLaser Plasma PhysicsHvm Euv Lithography	2011	37
Laser-produced plasma-based extreme-ultraviolet light source technology for high-volume manufacturing extreme-ultraviolet lithography Junichi Fujimoto, Tamotsu Abe, Satoshi Tanaka, Journal of Micro/Nanolithography MEMS and MOEMS Ultraviolet LightEngineeringLaser-plasma InteractionLaser Plasma PhysicHigh-power Lasers	2012	33
LPP-EUV light source development for high volume manufacturing lithography Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringElectron-beam LithographyLaser-plasma InteractionLaser Physics	2013	31
Characterization and optimization of tin particle mitigation and EUV conversion efficiency in a laser produced plasma EUV light source Tatsuya Yanagida, Hitoshi Nagano, Y. Wada, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Short Wavelength OpticEngineeringSn ParticlesLaser Plasma PhysicsLaser-induced Breakdown	2011	25
Performance of new high-power HVM LPP-EUV source Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2016	25
Laser-produced-plasma light source development for extreme ultraviolet lithography Hiroshi Komori, Tamotsu Abe, Takashi Suganuma, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Extreme Ultraviolet LithographyEngineeringLaser Plasma PhysicsLaser-induced BreakdownConversion Efficiency	2003	24

Page 1