Hideo Hoshino

Laser produced EUV light source development for HVM

Akira Endo, Hideo Hoshino, Takashi Suganuma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 41 citations

Engineering, Laser Science, Laser-plasma Interaction +18

Laser-produced-plasma light source development for extreme ultraviolet lithography

Hiroshi Komori, Tamotsu Abe, Takashi Suganuma et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 24 citations

Extreme Ultraviolet Lithography, Engineering, Laser Plasma Physics +15

LPP EUV light source employing high power C0 2 laser

Hideo Hoshino, Takashi Suganuma, Takeshi Asayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 24 citations

Engineering, Laser Science, Laser-plasma Interaction +17

EUV radiation characteristics of a CO2 laser produced Xe plasma

H. Komori, Yoshifumi Ueno, Hideo Hoshino et al. · Applied Physics B · 2006 · 22 citations

Plasma Application, Laser-plasma Interaction, Laser Plasma Physic +1

Characterization of various Sn targets with respect to debris and fast ion generation

Yoshifumi Ueno, Hideo Hoshino, Tatsuya Ariga et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 20 citations

Engineering, Target Fabrication, Laser Applications +25