Hiroshi Komori

First generation laser-produced plasma source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 47 citations

Electrical Engineering, Engineering, High Speed +14

Laser produced EUV light source development for HVM

Akira Endo, Hideo Hoshino, Takashi Suganuma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 41 citations

Engineering, Laser Science, Laser-plasma Interaction +18

Laser-produced-plasma light source development for extreme ultraviolet lithography

Hiroshi Komori, Tamotsu Abe, Takashi Suganuma et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 24 citations

Extreme Ultraviolet Lithography, Engineering, Laser Plasma Physics +15

Characterization of various Sn targets with respect to debris and fast ion generation

Yoshifumi Ueno, Hideo Hoshino, Tatsuya Ariga et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 20 citations

Engineering, Target Fabrication, Laser Applications +25

Magnetic field ion mitigation for EUV light sources

Hiroshi Komori, Yousuke Imai, Georg Soumagne et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 19 citations

Electrical Engineering, Engineering, Physics +12