Yousuke Imai

Laser-produced-plasma light source development for extreme ultraviolet lithography

Hiroshi Komori, Tamotsu Abe, Takashi Suganuma et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 24 citations

Extreme Ultraviolet Lithography, Engineering, Laser Plasma Physics +15

Magnetic field ion mitigation for EUV light sources

Hiroshi Komori, Yousuke Imai, Georg Soumagne et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 19 citations

Electrical Engineering, Engineering, Physics +12

Laser-produced-plasma light source for EUV lithography

Georg Soumagne, Tamotsu Abe, Takashi Suganuma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 16 citations

Optical Materials, Engineering, Laser Science +20

Ion damage analysis on EUV collector mirrors

Hiroshi Komori, Georg Soumagne, Hideo Hoshino et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 15 citations

Electrical Engineering, Ion Implantation, Engineering +14

Laser-Produced Plasma Light Source Development for Extreme Ultraviolet Lithography

Hiroshi Komori, Georg Soumagne, Tamotsu Abe et al. · Japanese Journal of Applied Physics · 2004 · 13 citations

Repetition Rate, Extreme Ultraviolet Lithography, Engineering +10