Tatsuya Yanagida

Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources

Kentaro Tomita, Yuta Sato, Syouichi Tsukiyama et al. · Scientific Reports · 2017 · 50 citations · Full text

Efficient extreme ultraviolet emission from one-dimensional spherical plasmas produced by multiple lasers

Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi et al. · Applied Physics Express · 2014 · 33 citations

Laser-produced plasma-based extreme-ultraviolet light source technology for high-volume manufacturing extreme-ultraviolet lithography

Junichi Fujimoto, Tamotsu Abe, Satoshi Tanaka et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 33 citations

Ultraviolet Light, Engineering, Laser-plasma Interaction +17

Characterization and optimization of tin particle mitigation and EUV conversion efficiency in a laser produced plasma EUV light source

Tatsuya Yanagida, Hitoshi Nagano, Y. Wada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 25 citations

Short Wavelength Optic, Engineering, Sn Particles +15

Development of Laser-Produced Tin Plasma-Based EUV Light Source Technology for HVM EUV Lithography

Junichi Fujimoto, Tsukasa Hori, Tatsuya Yanagida et al. · Physics Research International · 2012 · 22 citations · Full text

Carbon Dioxide, Short Wavelength Optic, Optical Materials +20