Tsukasa Hori

Measurements of electron temperature, electron density, and neutral density in a radio-frequency inductively coupled plasma

Tsukasa Hori, M. Bowden, Kenji Uchino et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 86 citations

Electron Density, Engineering, Physics +14

A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering

Tsukasa Hori, M. Kogano, M. Bowden et al. · Journal of Applied Physics · 1998 · 56 citations

Electrical Engineering, Non-maxwellian Eedfs, Engineering +11

Large Eddy Simulation of Non-Evaporative and Evaporative Diesel Spray in Constant Volume Vessel by Use of KIVALES

Tsukasa Hori, Jiro Senda, Takahiro Kuge et al. · SAE technical papers on CD-ROM/SAE technical paper series · 2006 · 51 citations

Measurement of non-Maxwellian electron energy distributions in an inductively coupled plasma

Tsukasa Hori, M. Bowden, Kenji Uchino et al. · Applied Physics Letters · 1996 · 48 citations

Electrical Engineering, Engineering, Physics +12

First generation laser-produced plasma source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 47 citations

Electrical Engineering, Engineering, High Speed +14