Concepedia

Katsumi Iyanagi

KI

Statistics

Publications

3

Citations

50

H-Index

3

Active since

2002

Affiliations

Toshiba (Japan)(Current)

Katsumi Iyanagi is an author at Toshiba (Japan) specializing in materials science, surface science, and plasma simulation.

Publications per year

2002–2003

3

Publications

3

Modeling of Cu Transport in Sputtering Using a Monte Carlo Simulation

Osamu Yamazaki, Katsumi Iyanagi, Shigeyuki Takagi et al. · Japanese Journal of Applied Physics · 2002 · 21 citations

, , +17

Predictable topography simulation of SiO<sub>2</sub>etching by C<sub>5</sub>F<sub>8</sub>gas combined with a plasma simulation, sheath model and chemical reaction model

Shigeyuki Takagi, Seiji Onoue, Katsumi Iyanagi et al. · Plasma Sources Science and Technology · 2003 · 16 citations

, , +17

Topography Simulation of Reactive Ion Etching Combined with Plasma Simulation, Sheath Model, and Surface Reaction Model

Shigeyuki Takagi, Katsumi Iyanagi, Seiji Onoue et al. · Japanese Journal of Applied Physics · 2002 · 13 citations

, , +17

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