L. A. Clevenger

Statistics

Publications

Citations

334

H-Index

Active since

1992

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

L. A. Clevenger is an author at IBM Research - Thomas J. Watson Research Center specializing in materials science, materials engineering, and electronic materials.

Publications per year

1992–2020

Publications

The relationship between deposition conditions, the beta to alpha phase transformation, and stress relaxation in tantalum thin films

L. A. Clevenger, A. Mutscheller, J. M. E. Harper et al. · Journal of Applied Physics · 1992 · 180 citations

Natural Sciences, Materials Engineering, Materials Science +17

Role of stress relief in the hexagonal-close-packed to face-centered-cubic phase transformation in cobalt thin films

C. Cabral, Katayun Barmak, J. Gupta et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +13

Repeated compressive stress increase with 400 °C thermal cycling in tantalum thin films due to increases in the oxygen content

C. Cabral, L. A. Clevenger, R. Schad · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fully aligned via integration for extendibility of interconnects to beyond the 7 nm node

Benjamin D. Briggs, C. B. Peethala, D.L. Rath et al. · 2017 · 20 citations

Engineering, Electrical Engineering, Materials Engineering +17

Linewidth and underlayer influence on texture in submicrometer-wide Al and AlCu lines

J. L. Hurd, Kenneth P. Rodbell, L. Gignac et al. · Applied Physics Letters · 1998 · 19 citations

Engineering, Materials Engineering, Materials Science +17

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