Concepedia
Statistics
Publications
18
Citations
640
H-Index
17
Active since
1989
Affiliations
IMEC(Current)
KU Leuven
Intel (United States)
M. Meuris is an author at IMEC specializing in materials science, electronic materials, and semiconductor materials.
Publications per year
1989–2010
Ion-implantation issues in the formation of shallow junctions in germanium
Eddy Simoen, A. Satta, A. D’Amore et al. · Materials Science in Semiconductor Processing · 2006 · 112 citations
Engineering, Materials Engineering, Materials Science +14
First-principles study of the structural and electronic properties of (100)Ge∕Ge(M)O2 interfaces (M=Al, La, or Hf)
Michel Houssa, G. Pourtois, Matty Caymax et al. · Applied Physics Letters · 2008 · 71 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
Determination of the angle of incidence in a Cameca IMS‐4f SIMS instrument
M. Meuris, Peter De Bisschop, J. Leclair et al. · Surface and Interface Analysis · 1989 · 47 citations
Natural Sciences, Chemistry, Instrumentation +8
On the effect of an oxygen beam in sputter depth profiling
M. Meuris, Wilfried Vandervorst, J. A. Jackman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 46 citations
Natural Sciences, Materials Science, Physics +13
Ge 3d core-level shifts at (100)Ge∕Ge(Hf)O2 interfaces: A first-principles investigation
Geoffrey Pourtois, Michel Houssa, Annelies Delabie et al. · Applied Physics Letters · 2008 · 39 citations
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