Concepedia
Statistics
Publications
14
Citations
398
H-Index
12
Active since
1977
Affiliations
Canon Anelva (Japan)(Current)
NEC (Japan)
Nagoya University
Tohoku University
Tsutomu Tsukada is an author at Canon Anelva (Japan) specializing in plasma physics, natural sciences, and physics.
Publications per year
1977–2002
Etching characteristics of magnetic materials (Co, Fe, Ni) using CO/NH3 gas plasma for hardening mask etching
N. Matsui, K Mashimo, Akihiro Egami et al. · Vacuum · 2002 · 62 citations
Natural Sciences, Materials Engineering, Materials Science +14
New Ultra-High-Frequency Plasma Source for Large-Scale Etching Processes
Seiji Samukawa, Yukito Nakagawa, Tsutomu Tsukada et al. · Japanese Journal of Applied Physics · 1995 · 58 citations
Engineering, Electrical Engineering, Physics +14
Self-sputtering phenomena in high-rate coaxial cylindrical magnetron sputtering
N. Hosokawa, Tsutomu Tsukada, Takeshi MISUMI · Journal of Vacuum Science and Technology · 1977 · 47 citations
Natural Sciences, Materials Science, Physics +13
Uniform plasma produced by a plane slotted antenna with magnets for electron cyclotron resonance
Noriyoshi Sato, Satoru Iizuka, Yukito Nakagawa et al. · Applied Physics Letters · 1993 · 44 citations · Full text
Engineering, Electrical Engineering, Physics +16
Low-temperature, uniform, and high-density plasma produced by a new ultra-high-frequency discharge with a spokewise antenna
Seiji Samukawa, Yukito Nakagawa, Tsutomu Tsukada et al. · Applied Physics Letters · 1995 · 39 citations
Natural Sciences, Electrical Engineering, Physics +13
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