Uniform plasma produced by a plane slotted antenna with magnets for electron cyclotron resonance

Abstract

A uniform plasma is produced by a new plane slotted antenna with permanent magnets for the electron cyclotron resonance. The plasma is uniform within a few percent in a diameter of 25–30 cm at a distance of 25–30 cm from the antenna. The plasma density, 1.5×1010 cm−3 with electron temperature of 1.8 eV at a microwave power of 100 W, is almost proportional to the microwave power. A magnetic distribution provided by the magnets is essential for producing such a uniform plasma.