A. Durandet

Microwave multipolar plasmas excited by distributed electron cyclotron resonance: Concept and performance

M. Pichot, A. Durandet, Jacques Pelletier et al. · Review of Scientific Instruments · 1988 · 131 citations

Engineering, Physics, Applied Plasma Physic +10

Synthesis of cubic boron nitride thin films

David R. McKenzie, W. D. McFall, Sean Reisch et al. · Surface and Coatings Technology · 1996 · 56 citations

Materials Engineering, Cubic Boron, Materials Science +6

Effects of ion bombardment and chemical reaction on wafer temperature during plasma etching

A. Durandet, O. Joubert, Jacques Pelletier et al. · Journal of Applied Physics · 1990 · 51 citations

Wafer Surface Temperature, Electrical Engineering, Ion Implantation +15

High pressure phases produced by low energy ion implantation with reference to cubic boron nitride

David R. McKenzie, W. D. McFall, H. B. Smith et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 46 citations

Materials Engineering, Materials Science, Ion Implantation +8

Deposition of silicon dioxide films using the helicon diffusion reactor for integrated optics applications

G. Giroult-Matlakowski, Christine Charles, A. Durandet et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 45 citations

Optical Materials, Engineering, Silicon Dioxide Films +20