Concepedia

M. Pichot

MP

Statistics

Publications

3

Citations

204

H-Index

3

Active since

1986

Affiliations

Alliance Université-Entreprise de Grenoble(Current)

M. Pichot is an author at Alliance Université-Entreprise de Grenoble specializing in engineering, physics, and plasma confinement.

Top concepts

Publications per year

1986–1990

3

Publications

3

Microwave multipolar plasmas excited by distributed electron cyclotron resonance: Concept and performance

M. Pichot, A. Durandet, Jacques Pelletier et al. · Review of Scientific Instruments · 1988 · 131 citations

, , +10

Effects of ion bombardment and chemical reaction on wafer temperature during plasma etching

A. Durandet, O. Joubert, Jacques Pelletier et al. · Journal of Applied Physics · 1990 · 51 citations

, , +15

Microwave multipolar plasmas: a possible solution for etching in microelectronics?

Jacques Pelletier, Y. Arnal, Barbara Petit et al. · Journal of Physics D Applied Physics · 1986 · 22 citations

, , +16

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