Concepedia

Y. Arnal

YA

Statistics

Publications

28

Citations

920

H-Index

19

Active since

1984

Affiliations

Centre National de la Recherche Scientifique(Current)

Université Joseph Fourier

Université d'Orléans

Y. Arnal is an author at Centre National de la Recherche Scientifique specializing in physics, natural sciences, and plasma physics.

Publications per year

1984–2007

28

Publications

28

Microwave multipolar plasmas excited by distributed electron cyclotron resonance: Concept and performance

M. Pichot, A. Durandet, Jacques Pelletier et al. · Review of Scientific Instruments · 1988 · 131 citations

, , +12

The etching of polymers in oxygen-based plasmas: A parametric study

O. Joubert, Jacques Pelletier, Y. Arnal · Journal of Applied Physics · 1989 · 92 citations

, , +17

Multi-dipolar plasmas for uniform processing: physics, design and performance

A. Lacoste, T. Lagarde, Shih‐I Chu et al. · Plasma Sources Science and Technology · 2002 · 89 citations

, , +11

Determination of the EEDF by Langmuir probe diagnostics in a plasma excited at ECR above a multipolar magnetic field

T. Lagarde, Y. Arnal, A. Lacoste et al. · Plasma Sources Science and Technology · 2001 · 45 citations

, , +11

Influence of the multipolar magnetic field configuration on the density of distributed electron cyclotron resonance plasmas

T. Lagarde, Jacques Pelletier, Y. Arnal · Plasma Sources Science and Technology · 1997 · 40 citations

, , +12

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