K Mashimo - Concepedia

Author

K Mashimo

Also Known As

K Mashimo, K. Mashimo, Kimiko Mashimo, Kimiko Mashimo Kimiko Mashimo

Publications

Citations

H-Index

Concepts

All Affiliations

K Mashimo is an author at Canon Anelva (Japan) specializing in applied physics, engineering, and microfabrication.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	84
2	Applied Physics	3	3	84
3	Electrical Engineering	2	2	23
4	Materials Engineering	2	2	73
5	Materials Science	2	2	73

K Mashimo

Publications

Citations

H-Index

Page 1

	Year	Citations
Etching characteristics of magnetic materials (Co, Fe, Ni) using CO/NH3 gas plasma for hardening mask etching N. Matsui, K Mashimo, Akihiro Egami, Vacuum Materials ScienceMagnetismMaterials EngineeringEngineeringMicrofabrication	2002	61
Electrode Temperature Effect in Narrow-Gap Reactive Ion Etching Tsutomu Tsukada, Supika Mashiro, K Mashimo Japanese Journal of Applied Physics EngineeringElectron-beam LithographyVacuum DeviceSilicon On InsulatorPlasma Processing	1993	12
etching by<b><i>M</i></b>= 0 helicon plasma Hiroshi Nogami, Yoneichi Ogahara Yoneichi Ogahara, K Mashimo, Plasma Sources Science and Technology Electrical EngineeringEngineeringPhysicsApplied PhysicsPlasma Physics	1996	11

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