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Active since
1996
Yoneichi Ogahara Yoneichi Ogahara is an author specializing in selective etching, plasma-surface interactions, and discharge processes.
Publications per year
1996–1996
etching by<b><i>M</i></b>= 0 helicon plasma
Hiroshi Nogami, Yoneichi Ogahara Yoneichi Ogahara, K Mashimo et al. · Plasma Sources Science and Technology · 1996 · 11 citations
Natural Sciences, Physics, Electronic Materials +15
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