Statistics
Publications
3
Citations
88
H-Index
3
Active since
1999
Affiliations
Canon Anelva (Japan)(Current)
Akihiro Egami is an author at Canon Anelva (Japan) specializing in natural sciences, materials engineering, and materials science.
Publications per year
1999–2005
3
3
Gap-filling property of Cu film by chemical vapor deposition
Atsushi Sekiguchi, Tomoaki Koide, Osamu Okada et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 10 citations
Natural Sciences, Materials Engineering, Materials Science +14
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