Concepedia
Statistics
Publications
6
Citations
126
H-Index
Active since
2003
Affiliations
Tokyo Electron (Japan)(Current)
Toshiba (Japan)
Takayuki Toshima is an author at Tokyo Electron (Japan) specializing in materials engineering, materials science, and engineering.
Publications per year
2003–2014
Contact hole shrink process using graphoepitaxial directed self-assembly lithography
Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 48 citations · Full text
Engineering, Materials Engineering, Materials Science +16
Contact hole shrink process using directed self-assembly
Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 22 citations
Natural Sciences, Materials Engineering, Materials Science +16
Novel photoresist stripping technology using ozone/vaporized water mixture
Hitoshi Abe, Hayato Iwamoto, Takayuki Toshima et al. · IEEE Transactions on Semiconductor Manufacturing · 2003 · 19 citations
Engineering, Electrical Engineering, Materials Engineering +13
Advanced Wafer Drying Technology for 1x Node and Beyond Using Surface Modification Method
Tsukasa Watanabe, Takayuki Toshima, Mitsunori Nakamori et al. · ECS Transactions · 2013 · 13 citations
Engineering, Materials Engineering, Materials Science +17
Impact of Electrostatic Effects on Wet Etching Phenomenon in Nanoscale Region
Atsushi Okuyama, Suguru Saito, Yoshiya Hagimoto et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2014 · 12 citations
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