Sergei V. Postnikov

Study of resolution limits due to intrinsic bias in chemically amplified photoresists

Sergei V. Postnikov, M. D. Stewart, Hoang V. Tran et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 60 citations

Natural Sciences, Materials Science, Physics +6

Study of acid transport using IR spectroscopy and SEM

M. D. Stewart, Mark Somervell, Hoang V. Tran et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 28 citations

Natural Sciences, Chemistry, Materials Science +17

Critical dimension control in optical lithography

Sergei V. Postnikov, Scott D. Hector, César M. Garza et al. · Microelectronic Engineering · 2003 · 20 citations

Engineering, Manufacturing Engineering, Materials Science +14

Split and design guidelines for double patterning

Vincent Wiaux, Staf Verhaegen, Shaunee Cheng et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 17 citations

Engineering, Computer Engineering, Computer-aided Design +11

Status and future of maskless lithography

Daniel Henry, Jan Willem Gemmink, Laurent Pain et al. · Microelectronic Engineering · 2006 · 16 citations

Engineering, Electrical Engineering, Manufacturing Engineering +7