Concepedia

Johan Vertommen

JV

Statistics

Publications

6

Citations

105

H-Index

6

Active since

1992

Affiliations

IMEC(Current)

Philips (Belgium)

Lam Research (Austria)

Imec the Netherlands

Johan Vertommen is an author at IMEC specializing in materials science, semiconductor devices, and microelectronics.

Publications per year

1992–2011

6

Publications

6

Silicon Nano-Pillar Test Structures for Quantitative Evaluation of Wafer Drying Induced Pattern Collapse

Ingrid Vos, David Hellin, Johan Vertommen et al. · ECS Transactions · 2011 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

Rate Constants of the Reactions of CF<sub>3</sub>O<sub>2</sub>, i‐C<sub>3</sub>H<sub>7</sub>O<sub>2</sub> and t‐C<sub>4</sub>H<sub>9</sub>O<sub>2</sub> with NO

Jozef Peeters, Johan Vertommen, Ivan Langhans · Berichte der Bunsengesellschaft für physikalische Chemie · 1992 · 21 citations

Natural Sciences, Chemistry, Chemical Kinetics +15

Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors

T. Schram, L.-Å. Ragnarsson, G.S. Lujan et al. · Microelectronics Reliability · 2005 · 20 citations

Engineering, Electrical Engineering, Materials Science +15

Dry development in an O2/SO2 plasma for sub-0.18 μm top layer imaging processes

A. M. Goethals, F. Van Roey, Takashi Sugihara et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +17

45nm nMOSFET with metal gate on thin SiON driving 1150μA/μm and off-state of 10nA/μ

K. Henson, R.J.P. Lander, M. Demand et al. · 2005 · 12 citations

Engineering, Electrical Engineering, Materials Science +17

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