Statistics
Publications
1
Citations
14
H-Index
1
Active since
1998
Affiliations
IMEC(Current)
F. Van Roey is an author at IMEC specializing in etch rate, line-edge roughness, and thin films.
Publications per year
1998–1998
1
1
Dry development in an O2/SO2 plasma for sub-0.18 μm top layer imaging processes
A. M. Goethals, F. Van Roey, Takashi Sugihara et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 14 citations
Natural Sciences, Materials Engineering, Materials Science +17
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