Julien Mailfert

Lateral diffusion of minority carriers in InAsSb-based nBn detectors

E. Plis, Stephen Myers, M. N. Kutty et al. · Applied Physics Letters · 2010 · 43 citations

Wide-bandgap Semiconductor, Electrical Engineering, Engineering +9

Impact of stochastic effects on EUV printability limits

Peter De Bisschop, Jeroen Van de Kerkhove, Julien Mailfert et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 42 citations

Reliability, Reliability Engineering, Engineering +14

Extending SMO into the lens pupil domain

Monica Kempsell Sears, Germain Fenger, Julien Mailfert et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 15 citations

Engineering, Microscopy, Optic Design +16

Optimum ArFi laser bandwidth for 10nm node logic imaging performance

Paolo Alagna, Omar Zurita, Vadim Timoshkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 14 citations

Engineering, Electron-beam Lithography, Optical Transmission System +18

Experimental validation of rigorous, 3D profile models for negative-tone develop resists

Weimin Gao, Ulrich Klostermann, Itaru Kamohara et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 10 citations