Concepedia

Author

Vadim Timoshkov

ASML (Netherlands)

Also Known As

Timoshkov, Vadim, V. Timoshkov, V. Y. Timoshkov, Vadim Timoshkov

21

Publications

147

Citations

6

H-Index

31

Concepts

All Affiliations

ASML (Netherlands)IMEC
VT

About

Vadim Timoshkov is an author at ASML (Netherlands) specializing in computer engineering, microelectronics, and engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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4

79

2

Computer Engineering

4

4

79

3

Applied Physics

2

2

21

4

Business

1

1

11

5

Natural Sciences

1

1

44

Vadim Timoshkov

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6

Publications

114

Citations

6

H-Index

YearCitations

Patterning control strategies for minimum edge placement error in logic devices

Jan Mulkens, M. M. Hanna, Bram Slachter,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2017

44

SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform

Joost Bekaert, Paolo Di Lorenzo, Ming Mao,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2017

25

Optimum ArFi laser bandwidth for 10nm node logic imaging performance

Paolo Alagna, Omar Zurita, Vadim Timoshkov,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2015

14

Process window limiting hot spot monitoring for high-volume manufacturing

M. Jochemsen, Roy Anunciado, Vadim Timoshkov,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2016

11

Nanodiamonds in magnetic recording system technologies

V. I. Kurmashev, Yu. V. Timoshkov, T. I. Orehovskaja,

Physics of the Solid State

2004

10

Co-optimization of lithographic and patterning processes for improved EPE performance

Mark J. Maslow, Vadim Timoshkov, Ton Kiers,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2017

10

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