Concepedia

Vadim Timoshkov

VT

6

Publications

114

Citations

6

H-Index

2004

Active since

Affiliations

ASML (Netherlands)(Current)

IMEC

Vadim Timoshkov is an author at ASML (Netherlands) specializing in computer engineering, microelectronics, and engineering.

Top concepts

EngineeringMicroelectronicsComputer Engineering3D PrintingApplied PhysicsInstrumentationOptical PropertiesSystems EngineeringElectronic PackagingComputer-aided Design

Publications per year

2004–2017

6

Publications

6

Patterning control strategies for minimum edge placement error in logic devices

Jan Mulkens, M. M. Hanna, Bram Slachter et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 44 citations

Engineering, Electron-beam Lithography, Electronic Design Automation +21

SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform

Joost Bekaert, Paolo Di Lorenzo, Ming Mao et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 25 citations

Optimum ArFi laser bandwidth for 10nm node logic imaging performance

Paolo Alagna, Omar Zurita, Vadim Timoshkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 14 citations

Engineering, Electron-beam Lithography, Optical Transmission System +18

Process window limiting hot spot monitoring for high-volume manufacturing

M. Jochemsen, Roy Anunciado, Vadim Timoshkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 11 citations

Engineering, Industrial Engineering, Defect Tolerance +18

Nanodiamonds in magnetic recording system technologies

V. I. Kurmashev, Yu. V. Timoshkov, T. I. Orehovskaja et al. · Physics of the Solid State · 2004 · 10 citations

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