Statistics
Publications
6
Citations
363
H-Index
6
Active since
1998
Affiliations
M. M. Hanna is an author at ASML (Netherlands) specializing in agriculture, pasture ecology, and edge placement error.
Publications per year
1998–2017
6
6
David Lamb, Moira L. Steyn‐Ross, P. Schaare et al. · International Journal of Remote Sensing · 2002 · 168 citations
Agriculture, Botany, Plant Sciences +16
Overlay and edge placement control strategies for the 7nm node using EUV and ArF lithography
Jan Mulkens, M. M. Hanna, Hannah Wei et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 68 citations
Engineering, Electrical Engineering, Manufacturing Engineering +17
Patterning control strategies for minimum edge placement error in logic devices
Jan Mulkens, M. M. Hanna, Bram Slachter et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 46 citations
Engineering, Computer Engineering, Manufacturing Engineering +14
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