Jim Thackeray

Statistics

Publications

Citations

110

H-Index

Active since

1996

Affiliations

University at Albany, State University of New York(Current)

Lawrence Berkeley National Laboratory

Jim Thackeray is an author at University at Albany, State University of New York specializing in engineering, photochemistry, and chemical engineering.

Top concepts

EngineeringChemistryPhotochemistryChemical EngineeringApplied PhysicsOptoelectronicsOptical PropertiesHealthPhysicsCorrosion

Publications per year

1996–2012

Publications

Resolution, LER, and sensitivity limitations of photoresists

Gregg M. Gallatin, Patrick Naulleau, Dimitra Niakoula et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 48 citations

Super-resolution Imaging, Rls Tradeoff, Engineering +11

High sensitivity chemically amplified EUV resists through enhanced EUV absorption

Owendi Ongayi, Matthew D. Christianson, Matthew M. Meyer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 26 citations

Engineering, Chemistry, Molecular Polymer +19

Film quantum yields of EUV and ultra-high PAG photoresists

Elsayed Hassanein, Craig Higgins, Patrick Naulleau et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 22 citations

Engineering, Inorganic Photochemistry, Chemistry +18

Correlation of UVIIHS resist chemistry to dissolution rate measurements

Jim Thackeray, T. H. Fedynyshyn, Dae Joon Kang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 14 citations

Dissolution Rate Measurements, Chemical Engineering, Engineering +11

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